APPLICATION: INDUCTION HEATING FURNACE FOR CRYSTAL GROWTH PRODUCTS

Challenge:Customer’s feedthroughs were leaking from overuse, poor connections, and constant thermal exposure due to RF power generation.

Solution:ISI created a water cooled copper based feedthrough that could handle RF power with specialized interfaces that could be mounted to an existing vacuum chamber.

Result:Customer will be able to retrofit all of their processing stations with increased productivity and very little engineering maintenance.

Induction Heating Furnace for Crystal Growth


APPLICATION: FRONT END WAFER PROCESSING CHAMBER

Challenge:Customer’s epoxy feedthroughs were challenged to systemically replicate on a monthly basis (monthly demand increasing). They had multiple electrical connections in a very small area with exposure to high temperatures and high vacuum.

Solution:ISI created a custom multipin weldable header that could handle RF Power, T/C pairs, and multipin leads for signal – in a very small foot print; that could easily interface with their existing hardware.

Result:Customer will now have a production tool that can be replicated on monthly basis and service their growing industry.

Front End Wafer Processing Chamber


APPLICATION: X-RAY INSTRUMENTATION

Challenge:Customer’s device was launched into market arena with an expensive specialized multipin. They needed a UHV multipin that was small, cost effective in production, and that could operate in a radiated environment.

Solution:ISI introduced a multipin standard design that was not considered a stock item due to the seal geometries and size.

Result:Customer will now have an inexpensive “high end” multipin that will meet their costing objectives and radioactive environment with very little engineering design time that can be shipped very quickly.

X-ray Instrumentation